JPS6182433A - 微動機構 - Google Patents

微動機構

Info

Publication number
JPS6182433A
JPS6182433A JP59204821A JP20482184A JPS6182433A JP S6182433 A JPS6182433 A JP S6182433A JP 59204821 A JP59204821 A JP 59204821A JP 20482184 A JP20482184 A JP 20482184A JP S6182433 A JPS6182433 A JP S6182433A
Authority
JP
Japan
Prior art keywords
voltage
drive
members
fine movement
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59204821A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0358855B2 (en]
Inventor
Kazuyoshi Sugihara
和佳 杉原
Toru Tojo
東条　徹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP59204821A priority Critical patent/JPS6182433A/ja
Publication of JPS6182433A publication Critical patent/JPS6182433A/ja
Publication of JPH0358855B2 publication Critical patent/JPH0358855B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP59204821A 1984-09-29 1984-09-29 微動機構 Granted JPS6182433A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59204821A JPS6182433A (ja) 1984-09-29 1984-09-29 微動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59204821A JPS6182433A (ja) 1984-09-29 1984-09-29 微動機構

Publications (2)

Publication Number Publication Date
JPS6182433A true JPS6182433A (ja) 1986-04-26
JPH0358855B2 JPH0358855B2 (en]) 1991-09-06

Family

ID=16496938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59204821A Granted JPS6182433A (ja) 1984-09-29 1984-09-29 微動機構

Country Status (1)

Country Link
JP (1) JPS6182433A (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0197538A (ja) * 1987-10-06 1989-04-17 Nec Corp 位置決め機構
JPH01109047A (ja) * 1987-10-20 1989-04-26 Nec Corp 位置決め機構

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157451A (en) * 1979-05-21 1980-12-08 Chiyou Lsi Gijutsu Kenkyu Kumiai Positioning device
JPS58190079A (ja) * 1982-04-28 1983-11-05 Toshiba Corp 微動機構

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157451A (en) * 1979-05-21 1980-12-08 Chiyou Lsi Gijutsu Kenkyu Kumiai Positioning device
JPS58190079A (ja) * 1982-04-28 1983-11-05 Toshiba Corp 微動機構

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0197538A (ja) * 1987-10-06 1989-04-17 Nec Corp 位置決め機構
JPH01109047A (ja) * 1987-10-20 1989-04-26 Nec Corp 位置決め機構

Also Published As

Publication number Publication date
JPH0358855B2 (en]) 1991-09-06

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